FUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY

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Sinopse

Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers.

Ficha técnica

Código de barras:
9780849331800
Dimensões:
1.00cm x 16.00cm x 23.00cm
Edição:
3ª EDIÇÃO - 2011
Editora:
CRC PRESS
ISBN:
9780849331800
ISBN13:
9780849331800
Número de páginas:
2640
Peso:
2948 gramas
Ano de publicação:
2011